Tech Docs
FAQTC Wafer Temperature Measurement Scale
Catalog
Semiconductor process surface temperature measurement
The TC Wafer (Thermocouple Wafer) is a wafer-type temperature sensor designed specifically for semiconductor manufacturing processes. It precisely fixes the thermocouple sensing element to the wafer surface, enabling real-time measurement of the actual temperature at various locations during the manufacturing process, assisting in equipment calibration, process verification, and temperature uniformity analysis.
Widely used in high-precision temperature control equipment such as RTP, CVD, PVD, Etching, Photolithography, Hot Plate, Reflow, and Oven, it can effectively control the temperature distribution on the wafer surface, improving process stability and product yield.
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Product Introduction
TC Wafer
TCW-K・±1.1 °C / 0.4%
TC Panel
TCP・±1.1 °C / 0.4%
RTD Wafer
RTD Wafe・±0.05 °C
On Wafer
On Wafe・±0.1 °C
HRTD Wafer
HRTD Wafe・±1 °CProduct Specifications
| Parameter | Unit / basis | TC Wafer | TC Panel | RTD Wafer | onwafer | HRTD Wafer |
|---|---|---|---|---|---|---|
| Product name / model | TCW-K | TCP | RTDWafer | onwafer | HRTD Wafer | |
| Accuracy | ± °C | 1.1°C / 0.4% | ±1.1 °C | 0.05 | 0.1 | 1 |
| Resolution | °C | 0.1 | 0.1 | 0.001 | 0.01 | 0.1 |
| Sensor to sensor | < °C | 0.2 | 0.2 | 0.03 | 0.1 | 0.6 |
| Sensor type | Type-K | Type-K | RTD | IC | RTD | |
| Standard points | num | 1-5-9-13-17-21 | 10-17 | 1-5-9-13-17-21 | 53-65 | 9-13-17-21 |
| Power | External | External | External | Battery | Battery | |
| Notes | Commercial | Commercial | Wired wafer | Wireless wafer, plasma compatible | Wireless wafer, plasma incompatible | |
| Max sampling rate | Hz | 1 - 10 Hz | 1 - 10 Hz | 1 - 10 Hz | 1 - 2 Hz | 1 - 2 Hz |
| Operating range | Min - max °C | 0 °C - 1100 °C | 0 °C - 400 °C | 0 °C - 250 °C | -40 °C - 130 °C | 0 °C - 400 °C |
| Calibration range | Min - max °C | NA | NA | RT - 240 °C | -20 °C - 110 °C | RT - 350 °C |
| Substrate | Silicon / silicon carbide / sapphire | Silicon / glass | Silicon | Silicon | Silicon | |
| Wafer size | mm | 25 - 300 | 25 - 300 | 150 - 300 | 150 - 300 | 200 - 300 |
| Wire diameter | mm | 0.127 | 0.127 | FPC | NA | NA |
| Product weight | g | NA | NA | NA | 12 inch - 190 g / 8 inch - 120 g | 12 inch - 200 g / 8 inch - 130 g |
| Top coating | NA | NA | NA | Yttrium oxide / others | NA | |
| Power system | external PSU | external PSU | external PSU | Wireless charging | Wireless charging | |
| Communication | mini plug | mini plug | D-SUB | bluetooth | bluetooth | |
| Thickness | mm above | NA | NA | NA | 1.16 | 8 |
| Charge time | min | NA | NA | NA | 30 | 30 |
| Record time | min | Unlimited | Unlimited | Unlimited | 80 (RT) | 80 (RT) |
| Operation hours | hours | NA | NA | NA | 6 h | 6 h |
| Certify interval period | months | NA | NA | 12 | 12 | 12 |
